YAMABALA® Industry of Ultra-High Vacuum (UHV)

YAMABALA® Industry of Ultra-High Vacuum (UHV)
YAMABALA® SF9982 SF9984 SF9980 SF9970 SF8840 SF8830 SF8820 SF8810 SFGR603 

Product Description

 

The semiconductor industry is thriving today with advancements in technologies such as 5G, the Internet of Things (IoT), artificial intelligence (AI), electric vehicles, connected medical devices, and industrial robots. These sophisticated applications often require faster processing speeds and lower power consumption, which in turn demand more complex manufacturing processes. Many of these processes now achieve production precision below 3 nanometers, meaning even the smallest contaminants can cause product defects and yield losses. These systems must operate with high reliability to meet growing demand.

Semiconductor manufacturing and processing equipment often operates under high temperatures and vacuum conditions. Therefore, high-performance lubricants are essential to protect linear guides, sliders, bearings, ballscrews, and seals in manufacturing and high-speed inspection systems from wear and tear.
Lubricants must withstand high temperatures without evaporating to effectively protect mechanical components in semiconductor fabs. With vapor pressures reaching 10⁻⁹ torr @ 140°C, outgassing becomes more likely at elevated temperatures. Many of YAMABALA's vacuum and cleanroom lubricants are formulated to perform at temperatures up to 250°C.

Outgassing and particle generation from lubricants can contaminate semiconductor equipment and products, negatively impacting product quality and yield. To address these challenges, YAMABALA provides high-performance specialty greases with low outgassing and minimal particle generation. Specifically designed to meet the stringent requirements of vacuum manufacturing environments, these lubricants are chemically stable, non-toxic, and feature low vapor pressure. They are ideal for components such as ballscrews, high-speed bearings, motion control linear guides, and various other parts used in semiconductor manufacturing.
 

YAMABALA® Industry of Ultra-High Vacuum (UHV)
SF9982 Fluorinated grease	Formulated with Fomblin-based technology, SF9982 is a fully fluorinated lubricant designed for high vacuum and cleanroom environments. It uses a narrow molecular weight distribution, combined with various additives to homogenize the thickener and base oil, resulting in a low evaporation, high-vacuum micron grease. SF9982 offers outstanding lubrication durability, extremely low evaporation, excellent oxidative stability, and a broad operating temperature range. Typical applications include machinery and mechatronics operating in extreme temperatures and corrosive environments. [Suitable Industries] Lubrication for semiconductor cleanroom equipment, semiconductor processing and chemical machinery shafts or O-rings, high-precision medical instruments, robotic L/M guides and screws, aerospace turbines, fuel nozzles, flap and aileron actuators, space vehicles, aerospace navigation devices, TFT/LCD systems, and PVD/CVD vacuum guideways. Operating Temperatre: -75~250°C Packaging: 1lb can, 1kg can, 100g tube, 100g syringe
SF9984  Fluorinated grease	Based on Fomblin technology, SF9984 is a fully fluorinated grease ideal for ultra-high vacuum and cleanroom applications. It features a narrower fluorinated molecular weight distribution than SFC9588. After 22 hours at 149°C (ASTM E595), it shows 0% evaporation loss. Vapor pressure reaches 10⁻⁹ torr at 120°C and 10⁻⁷ torr at 160°C. SF9984 offers excellent lubrication longevity, ultra-low evaporation, and high oxidative stability across a wide temperature range. [Suitable Industries] Lubrication for semiconductor cleanroom equipment, semiconductor processing and chemical machinery shafts or O-rings, high-precision medical instruments, robotic L/M guides and screws, aerospace turbines, fuel nozzles, flap and aileron actuators, space vehicles, aerospace navigation devices, TFT/LCD systems, and PVD/CVD vacuum guideways. Operating Temperature: -70~250°C Packaging: 1lb can, 1kg can, 100g tube, 100g syringe
SF9980 Fluorinated grease	An anti-corrosive grease using a highly stable, linear fluorinated polymer base oil thickened with PTFE. SF9980 provides excellent lubrication durability, extremely low evaporation, and high oxidative stability over a broad temperature range. Ideal for use in harsh thermal and corrosive environments. [Suitable Industries] Low-temperature refrigeration, optical instruments, precision tools, cleanrooms, semiconductors, military aerospace, paint production lines, satellites, aviation machinery, vacuum system drive components. Operating Temperature: -75~250°C Packaging: 1lb can, 1kg can, 100g tube, 100g syringe
SF9970 Fluorinated grease	A corrosion-resistant grease formulated with a linear fluorinated polymer base oil and PTFE thickener. SF9970 delivers excellent durability, ultra-low evaporation, and superior oxidative stability across an extensive temperature range. Its slow evaporation rate ensures long-lasting performance in high-temperature environments. Suitable for components operating in fluctuating high and low temperatures, especially in cold environments down to -80°C. [Suitable Industries] Low-temperature refrigeration, optical instruments, precision tools, cleanrooms, semiconductors, military aerospace, paint production lines, satellites, aviation machinery, vacuum system drive components. Operating Temperature: -80~220°C Packaging: 1lb can, 1kg can, 100g tube, 100g syringe
SF8840  Fluorinated grease	An anti-corrosive grease using a highly stable fluorinated polymer base oil thickened with PTFE. SF8840 provides excellent lubrication, high thermal and oxidative stability, and wide temperature performance. [Suitable Industries] Semiconductor cleanroom equipment, semiconductor and chemical machinery shafts or O-rings, precision medical equipment, robotic L/M guide/screw maintenance, aerospace turbines, fuel nozzles, flap and aileron actuators, space vehicles, aerospace navigation devices. Operating Temperature: -50°C~250°C Packaging: 1lb can, 1kg can, 100g tube, 100g syringe
SF8820 Fluorinated grease	A corrosion-resistant grease based on a stable fluorinated polymer liquid with PTFE thickening. SF8820 delivers exceptional lubrication longevity, high thermal and oxidative stability, and a broad operating temperature range. [Suitable Industries] Robotic arms, vacuum chambers, bearing greases, space vehicles, aerospace navigation equipment, high-precision medical instruments. Operating Temperature: -60~250°C Packaging: 1lb can, 1kg can, 100g tube, 100g syringe
SF8810 Fluorinated grease	An anti-corrosive grease formulated with a highly stable, linear fluorinated polymer base oil and PTFE thickener. SF8810 provides outstanding lubrication performance, high thermal and oxidative stability, and broad usability across various temperatures. [Suitable Industries] Robotic arms, vacuum chambers, bearing greases, space vehicles, aerospace navigation equipment, high-precision medical instruments. Operating Temperature: -60~240°C Packaging: 1lb can, 1kg can, 100g tube, 100g syringe
SFGR603 Fluorinated grease	A white, medium-consistency grease developed for manufacturing environments requiring low evaporation, chemical resistance to strong acids and alkalis, non-flammability, anti-corrosion protection, and compatibility with plastics and elastomers. Featuring a blend of enhanced properties, SFGR603 is the ideal lubricant for these challenging applications. With a broad operating temperature range, it performs reliably in environments with frequent temperature fluctuations. [Suitable Industries] Wheel bearings, spark plugs/screws, fuel pumps. Operating Temperature: -70~250°C Packaging: 1lb can, 1kg can, 100g tube, 100g syringe